Forth Quantum of Lens Design

  Lithographic lenses are projection lenses, working at fixed conjugates, imaging      an object (mask) on an image (wafer) with high NA, at ultraviolet wavelengths.
  Until 157nm the lenses can be refractive or catadioptric. For Extreme-UV all          systems are reflective only. 
  Objective lenses used in Lithography have to give a nearly perfect image and          this after assembly and adjustment.

  United competencies are the key to success 

  At the right moment in the design process, the available technologies from the suppliers of lens      elements and mechanical parts, have to be considered and integrated into the design. In special      cases, they have to create the materials you need to make the design possible.

  Cooperation with glass manufacturer is essential

  Lithography is the World of Nanometers.

  It is the essential role of optical engineers to challenge the limits of possible

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